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Advanced Optics
Galatek Advanced Optics technology uses innovative optical principles, materials and system designs to achieve high-resolution, sensitive, and fast dynamic detection of objects. Empowering the yield management of integrated circuit manufacturing by integrating subnano level advanced optics and AI.
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Technology Advantages
Design and Simulation of High Resolution Microscopic 0ptical Lens, White Light Interference Focusing Technology
Support ultra-high precision 0.25nm wafer post-lithographic Overlay error measurement and 28nm process.
Deep UV-193nm Weak Signal Detection Technology
Support minimum particle detection of 20nm wafers without graphic defect detection and 28nm process.
Spectral Confocal Technique
Support 3D microscopic imaging, 0.1μm Bump metrology accuracy and 2.5D/3D process.
Kernel Modules
Light Source System
Providing light source system with different wavelength, high stability and adjustable light power, it can be used for high resolution optical inspection, suitable for different processes in advanced manufacturing process.
Optical Imaging System
High-precision, high-numerical aperture objectives are used to achieve high-resolution imaging.
Detection and Sensor Systems
Low noise and high signal-to-noise ratio detectors are used to capture optical images and detect optical signal changes.
Image Processing and Analysis Software
It is used for image enhancement, segmentation, recognition, quantization, etc. and includes various algorithms such as edge detection, feature extraction, machine learning, etc. Data analysis software is provided and used to automatically collect, process and analyze production data to improve production efficiency.
Special Function
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High Resolution Imaging
The international leading imaging technology is used to achieve nanoscale resolution and effectively improve the detection accuracy of semiconductor devices.
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Multidimensional Detection
Through multi-wavelength, multi-angle and multi-polarization optical detection methods, the internal structure and performance of electronic devices are fully revealed.
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High Speed Data Processing
Combined with powerful computing power, it realizes high-speed acquisition, processing and analysis of optical signals, greatly improving the detection efficiency.
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Automation and Integration
Integrated into automated production lines to achieve automatic focus, automatic calibration and automatic defect identification.
High Resolution Imaging
The international leading imaging technology is used to achieve nanoscale resolution and effectively improve the detection accuracy of semiconductor devices.
Multidimensional Detection
Through multi-wavelength, multi-angle and multi-polarization optical detection methods, the internal structure and performance of electronic devices are fully revealed.
High Speed Data Processing
Combined with powerful computing power, it realizes high-speed acquisition, processing and analysis of optical signals, greatly improving the detection efficiency.
Automation and Integration
Integrated into automated production lines to achieve automatic focus, automatic calibration and automatic defect identification.
Application Scenarios
Inspection
Strong detection ability for defects with complex background and low contrast, covering scratches, cracks, hidden cracks, foreign matters, dirt, missing and other scenes of industrial defect detection needs. Good at solving small sample detection problems, suitable for multi-batch, small-batch flexible production scenarios.
Metrology
It can quantitatively describe the structure size and material properties of the wafer circuit, such as film thickness, key size, etching depth, surface topography and other physical parameters.
Biological monitoring
Optical imaging, such as confocal microscopy, optical coherence tomography, etc., can be used for cell and tissue imaging.
Applicable Industries
Integrated Circuit
Biomedical Science
Industrial Inspection
Environmental Monitoring
Other industries